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产品名称:EQ-PCE-80
型号:EQ-PCE-80
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产品描述:
PCE-80 is larger plasma cleaner with 8.5 "dia x 12“"L quartz chamber and 0 - 100W variable RF power. .  It is designed to clean and remove nano-scale organic contamination on substrate or wafer up to 8" using air, oxygen, or argon plasma.  The rate of organic removal is about 20 nm/min Max. at high RF power.    It is excellent tool to pre-clean single crystal substrate before epitaxial film deposition to achieve the better quality.  If you don't have experience for plasma surface cleaning, please refer to the articles as the follows:
  • McIntire, Theresa M., S. Rachelle Smalley, John T. Newberg, A. Scott Lea, John C. Hemminger, Barbara J. Finlayson-Pitts. "Substrate Changes Associated with the Chemistry of Self-Assembled Monolayers on Silicon." Langmuir (2006) 22(13): 5617-5624.
  • Sumner, Ann Louise, Erik J. Menke, Yael Dubowski, John T. Newberg, Reginald M. Penner, John C. Hemminger, Lisa M. Wingen, Theo Brauers, Barbara J. Finlayson-Pitts. "The Nature of Water on Surfaces of Laboratory Systems and Implications for Heterogeneous Chemistry in the Troposphere." Phys. Chem. Chem. Phys. (2004) 6: 604-613.
  • Mennicke, Ulrike, Tim Salditt. "Preparation of Solid-Supported Lipid Bilayers by Spin-Coating." Langmuir (2002) 18: 8172-8177.
SPECIFICATIONS

Input Power
  • AC 220V , 50/60 Hz, 
  • PF Power:    100 W Max.
  • Vacuum Pump:   < 500W
  • Total Power:    < 600W
RF Power
  • RF power is adjustable within 0 - 100W
  • RF frquency:   13,56 MH

Plasma Chamber
  • 8.5" O.D x 8.2" I.D x 12.5" L  high purity quart chamber
  • Hinged type fron flange made of aluminium
  • 2.3" Dia. ( 60mm) quartz window for easy observation
  • Totally RF radiation shield with zero RF leaking

Control Panel
  • 6" color touch screen to controll all parameters autamatically  for plasma cleaning, such as vacuum level, gas flow rate , RF power level, and cleaning time..
  • Built in one channel Mass flowmeter ( 0 - 500ml/minute) to control gas flow accurately.

Vacuum Pump and Valve
Inert Gas
  • Many inert gases can be choosen for plasma cleaning, such as N2, Ar, Air and Mixed gas depended on what kind material will be treated . ( not included in the package)
  • No flammable gas shall be used for the plasma cleaner
Optional
  • May use 2" - 6" wafer quartz boat, as round wafer sample holder.( click under lined to ordeer at extra cost )
  • May use 2 - 4 channel gas delivery sytem to fill mixing gases ( click underlined to order )
      
Overall Dimensions
  • 620 L ×450 W ×600 H, mm
  • 24" x 18" x 23.5"  ( inch )

Net Weight
  • 80 Lbs without pump
  • 105 Lbs with vacuum pump
WarrantyOne year limited warranty with lifetime support ( no warranty for Pyrex glass chamber )



Operation Manual

    http://www.mtixtl.com/PlasmaCleaner-PCE80.aspx

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